Handbook of Charged Particle Optics, Second Edition

Handbook of Charged Particle Optics, Second Edition

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With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The booka€™s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the fielda€™s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.(1985) at Hitachi pioneered the use of FIB for integrated circuit (IC) cross sectioning, whereas Kubena et al. ... 1989) at Intel began to use FIB for commercial use in mask repair and IC production failure analysis and reconfiguration. Sudraud et al. (1988) at CNRS combined FIB with a scanning electron microscope, the first dual beam system used as a microcircuit surgery tool (Melngailis et al., 1986).

Title:Handbook of Charged Particle Optics, Second Edition
Author: Jon Orloff
Publisher:CRC Press - 2008-10-24

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