Materials Issues in Amorphous-Semiconductor Technology:

Materials Issues in Amorphous-Semiconductor Technology:

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... TAKASHI IGARASHI AND SADAAKI YAMAMOTO Central Research Institute, Mitsui Tcatsu Chemicals Inc., 1190 Kasama-cho, Totsuka-ku, ... However, higher electric power density and higher substrate temperature were required. ... A schematic diagram of an apparatus used in this study is shown in Fig.1. ... The CO, laser beam was introduced into the stainless steel chamber through a ZnSe window.

Title:Materials Issues in Amorphous-Semiconductor Technology:
Author: D. Adler, Y. Hamakawa, A. Madan
Publisher:Materials Research Society - 2011-11-21

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