MEMS Mechanical Sensors

MEMS Mechanical Sensors

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Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.Simulation software tools for electronic circuits are very mature nowadays, and the level of realism is striking. Often the first fabricated prototype of a ... electrical, thermal, and optical. All these domains interact and influence each other, making anbsp;...

Title:MEMS Mechanical Sensors
Author: Stephen Beeby
Publisher:Artech House - 2004-01-01

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