The SGTE casebook

The SGTE casebook

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10* 10a€c* 10* 10a€cs 10a€c4 10a€c3 102 PsiHzClj alt;atm) Fig. 12.4 CVD phase diagram of the WCU-SiChH^Hz-Ar system. ... Each one of the CVD phase diagrams presented concerns a specific gas mixture and the resulting conclusions ... In Figure 12.5 the CVD phase diagram is presented [91Mas] for the deposition of titanium silicides from an SiH4, Pfc, Ar and titanium tetrachloride, TiCLj containing gas phase.

Title:The SGTE casebook
Author: Klaus Hack, Scientific Group Thermodata Europe
Publisher:Woodhead Pub Ltd - 1996

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